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This material is a mixture of ortho
SEMI E16-90 (first published)
低レベルのデバイスのネットワーク化の解決法
作業監督者
C03800 - SEMI C38 - Guide for Phosphorus Oxychloride StdPbc-1121 This material is a mixtureNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. 1 Purpose 1. 1 The purpose of this Standard is to provide a guide for a grade of phosphorus oxychloride for which a need has been identified. 2 Scope 2. 1 This Standard lists the proposed impurity limits of phosphorus
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