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org October 2003
1 The scope of this Standard is automated material processing based on discrete processing jobs
The glass substrate is in shape of a wafer (round) or a panel (square or rectangular)
3 — Specification for Web Services for Substrate Mapping
MS00400 - SEMI MS4 - Test Method for Young's Modulus Measurements of Thin, Reflecting Films Based on the Frequency of Beams in Resonance StdPbc-0317 org October 2003The absence of a generally accepted method to determine Youngs modulus has provided a challenge to the microelectromechanical systems (MEMS) community for many years. Without a standard measurement technique, measurements between different laboratories cannot be meaningfully compared. This Standard provides a test method to determine Youngs modulus for thin, reflecting films, based on the average resonance frequency of a single layered cantilever. It
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